PROF. BARUS' work is divided into twelve chapters, and occupies an intermediate position between the usual textbook dealing with routine work and the ordinary type of original research which attacks ...

Sensors for the measurement of displacement based on a number of different physical principles are available for a wide range of applications. This article considers systems capable of resolutions of ...

Modern semiconductor manufacturing technology has advanced rapidly. Because of this, measurement using non-contact displacement and transparent coating thickness has become very critical. Applications ...

The scanning interference field exposure technique is an effective method to fabricate holographic diffraction grating with meter-level size and nano-level precision. The main problems of fabricating ...

It is not an easy task to measure to the nanometer scale—achieving it requires careful engineering and a stable sensor. The sensors employed for stage position feedback within semiconductor ...

Researchers have moved a step closer to achieving quantum-noise-limited measurements using laser interferometry – a technique routinely employed for detecting the motion and displacement of tiny ...